The influence of composition on the solid state properties of anodic films on Al-Ta alloys

Andrea Zaffora; Francesco Di Quarto; Monica Santamaria; Francesco Di Franco

The influence of composition on the solid state properties of anodic films on Al-Ta alloys

Andrea Zaffora, Francesco Di Quarto, Monica Santamaria, Francesco Di Franco

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Risultato della ricerca: Conference contribution

Abstract

Microelectronics is very important for almost all kinds of technology evolutions in the past four decades. In this area, the dielectrics science occupies a prominent place in providing the dominant technology in integrated capacitors or gate insulators.

Lingua originale	English
Titolo della pubblicazione ospite	ASST 2015 VII Aluminium Surface Science & Technology
Numero di pagine	1
Stato di pubblicazione	Published - 2015

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title = "The influence of composition on the solid state properties of anodic films on Al-Ta alloys",

abstract = "Microelectronics is very important for almost all kinds of technology evolutions in the past four decades. In this area, the dielectrics science occupies a prominent place in providing the dominant technology in integrated capacitors or gate insulators.",

keywords = "Al-Ta alloys, anodic films, solid state properties, Al-Ta alloys, anodic films, solid state properties",

author = "Andrea Zaffora and {Di Quarto}, Francesco and Monica Santamaria and {Di Franco}, Francesco",

year = "2015",

language = "English",

booktitle = "ASST 2015 VII Aluminium Surface Science & Technology",

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T1 - The influence of composition on the solid state properties of anodic films on Al-Ta alloys

AU - Zaffora, Andrea

AU - Di Quarto, Francesco

AU - Santamaria, Monica

AU - Di Franco, Francesco

PY - 2015

Y1 - 2015

N2 - Microelectronics is very important for almost all kinds of technology evolutions in the past four decades. In this area, the dielectrics science occupies a prominent place in providing the dominant technology in integrated capacitors or gate insulators.

AB - Microelectronics is very important for almost all kinds of technology evolutions in the past four decades. In this area, the dielectrics science occupies a prominent place in providing the dominant technology in integrated capacitors or gate insulators.

KW - Al-Ta alloys

KW - anodic films

KW - solid state properties

KW - Al-Ta alloys

KW - anodic films

KW - solid state properties

UR - http://hdl.handle.net/10447/189667

M3 - Conference contribution

BT - ASST 2015 VII Aluminium Surface Science & Technology

ER -

The influence of composition on the solid state properties of anodic films on Al-Ta alloys

Abstract

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