Abstract
Microelectronics is very important for almost all kinds of technology evolutions in the past four decades. In this area, the dielectrics science occupies a prominent place in providing the dominant technology in integrated capacitors or gate insulators.
Lingua originale | English |
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Titolo della pubblicazione ospite | ASST 2015 VII Aluminium Surface Science & Technology |
Numero di pagine | 1 |
Stato di pubblicazione | Published - 2015 |