The influence of composition on the solid state properties of anodic films on Al-Ta alloys

Francesco Di Quarto, Francesco Di Franco, Andrea Zaffora, Monica Santamaria

Risultato della ricerca: Conference contribution

Abstract

Microelectronics is very important for almost all kinds of technology evolutions in the past four decades. In this area, the dielectrics science occupies a prominent place in providing the dominant technology in integrated capacitors or gate insulators.
Lingua originaleEnglish
Titolo della pubblicazione ospiteASST 2015 VII Aluminium Surface Science & Technology
Numero di pagine1
Stato di pubblicazionePublished - 2015

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The influence of composition on the solid state properties of anodic films on Al-Ta alloys. / Di Quarto, Francesco; Di Franco, Francesco; Zaffora, Andrea; Santamaria, Monica.

ASST 2015 VII Aluminium Surface Science & Technology. 2015.

Risultato della ricerca: Conference contribution

Di Quarto, F, Di Franco, F, Zaffora, A & Santamaria, M 2015, The influence of composition on the solid state properties of anodic films on Al-Ta alloys. in ASST 2015 VII Aluminium Surface Science & Technology.
Di Quarto F, Di Franco F, Zaffora A, Santamaria M. The influence of composition on the solid state properties of anodic films on Al-Ta alloys. In ASST 2015 VII Aluminium Surface Science & Technology. 2015
Di Quarto, Francesco ; Di Franco, Francesco ; Zaffora, Andrea ; Santamaria, Monica. / The influence of composition on the solid state properties of anodic films on Al-Ta alloys. ASST 2015 VII Aluminium Surface Science & Technology. 2015.
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title = "The influence of composition on the solid state properties of anodic films on Al-Ta alloys",
abstract = "Microelectronics is very important for almost all kinds of technology evolutions in the past four decades. In this area, the dielectrics science occupies a prominent place in providing the dominant technology in integrated capacitors or gate insulators.",
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T1 - The influence of composition on the solid state properties of anodic films on Al-Ta alloys

AU - Di Quarto, Francesco

AU - Di Franco, Francesco

AU - Zaffora, Andrea

AU - Santamaria, Monica

PY - 2015

Y1 - 2015

N2 - Microelectronics is very important for almost all kinds of technology evolutions in the past four decades. In this area, the dielectrics science occupies a prominent place in providing the dominant technology in integrated capacitors or gate insulators.

AB - Microelectronics is very important for almost all kinds of technology evolutions in the past four decades. In this area, the dielectrics science occupies a prominent place in providing the dominant technology in integrated capacitors or gate insulators.

KW - Al-Ta alloys

KW - anodic films

KW - solid state properties

UR - http://hdl.handle.net/10447/189667

M3 - Conference contribution

BT - ASST 2015 VII Aluminium Surface Science & Technology

ER -

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