Technologies for the fabrication of cylindrical fine line devices

Claudio Arnone; Giuseppe Costantino Giaconia; Giuseppe Lullo

Technologies for the fabrication of cylindrical fine line devices

Claudio Arnone, Giuseppe Costantino Giaconia, Giuseppe Lullo

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Risultato della ricerca: Article › peer review

4 Citazioni (Scopus)

Abstract

A microlithographic process suited for metal patterning on cylindrical dielectric substrates has been developed. This includes all steps from metal coating to final etching, with resolution in the 5 μm range.

Lingua originale	English
pagine (da-a)	417-420
Numero di pagine	4
Rivista	Microelectronic Engineering
Volume	35
Stato di pubblicazione	Published - 1997

All Science Journal Classification (ASJC) codes

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???subjectarea.asjc.3100.3107???
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title = "Technologies for the fabrication of cylindrical fine line devices",

abstract = "A microlithographic process suited for metal patterning on cylindrical dielectric substrates has been developed. This includes all steps from metal coating to final etching, with resolution in the 5 μm range.",

author = "Claudio Arnone and Giaconia, {Giuseppe Costantino} and Giuseppe Lullo",

year = "1997",

language = "English",

volume = "35",

pages = "417--420",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

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TY - JOUR

T1 - Technologies for the fabrication of cylindrical fine line devices

AU - Arnone, Claudio

AU - Giaconia, Giuseppe Costantino

AU - Lullo, Giuseppe

PY - 1997

Y1 - 1997

N2 - A microlithographic process suited for metal patterning on cylindrical dielectric substrates has been developed. This includes all steps from metal coating to final etching, with resolution in the 5 μm range.

AB - A microlithographic process suited for metal patterning on cylindrical dielectric substrates has been developed. This includes all steps from metal coating to final etching, with resolution in the 5 μm range.

UR - http://hdl.handle.net/10447/427584

M3 - Article

VL - 35

SP - 417

EP - 420

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

ER -

Technologies for the fabrication of cylindrical fine line devices

Abstract

All Science Journal Classification (ASJC) codes

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