@article{892628b2ad36463ab7f02c48c1db6d09,
title = "Tantalum nitride thin film resistors by low temperature reactive sputtering for plastic electronics",
keywords = "AFM, SIMS, XPS, plastic electronics, tantalum nitride, AFM, SIMS, XPS, plastic electronics, tantalum nitride",
author = "Pignataro, {Bruno Giuseppe} and Indelli, {Giuseppe Francesco} and {Di Stefano}, {Maria Ausilia} and {Di Marco}, Silvestra and Salvatore Pignataro and Sebastiano Ravesi and Bruno Pignataro and Antonino Scandurra",
year = "2008",
language = "English",
volume = "40",
pages = "758--762",
journal = "Surface and Interface Analysis",
issn = "0142-2421",
publisher = "John Wiley and Sons Ltd",
}