Silicon nitride-based deep sub-λ slit for ultra-broadband THz coherent detection

Alessandro Tomasino, Alessandro Busacca, Matteo Clerici, Riccardo Piccoli, Sebastien Delprat, Alessandro Tomasino, Yoann Jestin, Yoann Jestin, Marco Peccianti, Roberto Morandotti, Mohamed Chaker, Luca Razzari

Risultato della ricerca: Other

Abstract

We report on the characterization of a new type of CMOS-compatible device for terahertz solid-state biased coherent detection, which relies on a 1-µm-wide metallic slit embedded in a thin film of PECVD-grown silicon nitride.
Lingua originaleEnglish
Numero di pagine2
Stato di pubblicazionePublished - 2018

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All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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Tomasino, A., Busacca, A., Clerici, M., Piccoli, R., Delprat, S., Tomasino, A., Jestin, Y., Jestin, Y., Peccianti, M., Morandotti, R., Chaker, M., & Razzari, L. (2018). Silicon nitride-based deep sub-λ slit for ultra-broadband THz coherent detection.