Planar Technology for NDT-Ge X-Ray Microcalorimeters: Absorber Fabrication

Marco Barbera, Giuseppe Lullo, Claudio Arnone, Ugo Lo Cicero, Perinatil, Varisco, Collura, Barbera

Risultato della ricerca: Otherpeer review

4 Citazioni (Scopus)

Abstract

We have investigated the electroplating process to deposit thick uniform films of tin on a Ge wafer coated with Spin-OnGlass, in order to fabricate the absorbers for Ge microcalorimeter arrays. Here we discuss some technological details andpropose two alternative metal bilayer to be used as seed for the electroplating.
Lingua originaleEnglish
Pagine112-114
Numero di pagine3
Stato di pubblicazionePublished - 2009

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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