Planar Technology for NDT-Ge X-Ray Microcalorimeters: Absorber Fabrication

Claudio Arnone, Marco Barbera, Giuseppe Lullo, Ugo Lo Cicero, Perinatil, Varisco, Collura, Barbera

Risultato della ricerca: Otherpeer review

2 Citazioni (Scopus)


We have investigated the electroplating process to deposit thick uniform films of tin on a Ge wafer coated with Spin-OnGlass, in order to fabricate the absorbers for Ge microcalorimeter arrays. Here we discuss some technological details andpropose two alternative metal bilayer to be used as seed for the electroplating.
Lingua originaleEnglish
Numero di pagine3
Stato di pubblicazionePublished - 2009

All Science Journal Classification (ASJC) codes

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