Planar Array Technology for the Fabrication of Germanium X-Ray Microcalorimeters

Claudio Arnone, Giuseppe Lullo, Marco Barbera, Ugo Lo Cicero, Ugo Lo Cicero, Salvatore Varisco, Alfonso Collura, Marco Barbera

Risultato della ricerca: Conference contribution

5 Citazioni (Scopus)


Several technologies are presently competing for measuring the temperature increase in cryogenic microcalorimeters used as high resolution energy-dispersive X-ray detectors. Doped germanium, whose resistivity depends on temperature, is a promising material for this purpose, because ofits comparatively low specific heat and the possibility of making wafers with high doping uniformity by neutron transmutation. Presently, Ge-based microcalorimeters are still micro-machined and manually assembled. Here we present a planar approach to the fabrication of 2-D arrays of microcalorimeters and show the preliminary technological results.
Lingua originaleEnglish
Titolo della pubblicazione ospiteNuclear Science Symposium Conference Record, 2008. NSS '08. IEEE
Numero di pagine4
Stato di pubblicazionePublished - 2008

All Science Journal Classification (ASJC) codes

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  • ???subjectarea.asjc.3100.3106???
  • ???subjectarea.asjc.2700.2741???


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