Several technologies are presently competing for measuring the temperature increase in cryogenic microcalorimeters used as high resolution energy-dispersive X-ray detectors. Doped germanium, whose resistivity depends on temperature, is a promising material for this purpose, because ofits comparatively low specific heat and the possibility of making wafers with high doping uniformity by neutron transmutation. Presently, Ge-based microcalorimeters are still micro-machined and manually assembled. Here we present a planar approach to the fabrication of 2-D arrays of microcalorimeters and show the preliminary technological results.
|Titolo della pubblicazione ospite||Nuclear Science Symposium Conference Record, 2008. NSS '08. IEEE|
|Numero di pagine||4|
|Stato di pubblicazione||Published - 2008|
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