Multi-bit storage through Si nanocrystals embedded in SiO2

Isodiana Crupi, De Salvo, Lombardo, Perniola, Corso, Melanotte, Isodiana Crupi, Ammendola, Gerardi

Risultato della ricerca: Article

13 Citazioni (Scopus)

Abstract

We have realized Si nanocrystal memory cells in which the Si dots have been deposited by CVD on SiO2 and then covered by a CVD control oxide. In this paper, we report a study on the potential of these cells for dual bit storage. © 2004 Elsevier B.V. All rights reserved.
Lingua originaleEnglish
pagine (da-a)411-414
Numero di pagine4
RivistaMicroelectronic Engineering
Volume72
Stato di pubblicazionePublished - 2004

    Fingerprint

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cita questo

Crupi, I., De Salvo, Lombardo, Perniola, Corso, Melanotte, Crupi, I., Ammendola, & Gerardi (2004). Multi-bit storage through Si nanocrystals embedded in SiO2. Microelectronic Engineering, 72, 411-414.