Multi-bit storage through Si nanocrystals embedded in SiO2

Isodiana Crupi; null De Salvo; null Lombardo; null Perniola; null Corso; null Melanotte; Isodiana Crupi; null Ammendola; null Gerardi

Multi-bit storage through Si nanocrystals embedded in SiO2

Isodiana Crupi, De Salvo, Lombardo, Perniola, Corso, Melanotte, Isodiana Crupi, Ammendola, Gerardi

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Risultato della ricerca: Article

13 Citazioni (Scopus)

Abstract

We have realized Si nanocrystal memory cells in which the Si dots have been deposited by CVD on SiO2 and then covered by a CVD control oxide. In this paper, we report a study on the potential of these cells for dual bit storage. © 2004 Elsevier B.V. All rights reserved.

Lingua originale	English
pagine (da-a)	411-414
Numero di pagine	4
Rivista	Microelectronic Engineering
Volume	72
Stato di pubblicazione	Published - 2004

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All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

Cita questo

Crupi, I., De Salvo, Lombardo, Perniola, Corso, Melanotte, Crupi, I., Ammendola, & Gerardi (2004). Multi-bit storage through Si nanocrystals embedded in SiO2. Microelectronic Engineering, 72, 411-414.

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title = "Multi-bit storage through Si nanocrystals embedded in SiO2",

abstract = "We have realized Si nanocrystal memory cells in which the Si dots have been deposited by CVD on SiO2 and then covered by a CVD control oxide. In this paper, we report a study on the potential of these cells for dual bit storage. {\textcopyright} 2004 Elsevier B.V. All rights reserved.",

author = "Isodiana Crupi and {De Salvo} and Lombardo and Perniola and Corso and Melanotte and Isodiana Crupi and Ammendola and Gerardi",

year = "2004",

language = "English",

volume = "72",

pages = "411--414",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}

TY - JOUR

T1 - Multi-bit storage through Si nanocrystals embedded in SiO2

AU - Crupi, Isodiana

AU - De Salvo, null

AU - Lombardo, null

AU - Perniola, null

AU - Corso, null

AU - Melanotte, null

AU - Crupi, Isodiana

AU - Ammendola, null

AU - Gerardi, null

PY - 2004

Y1 - 2004

N2 - We have realized Si nanocrystal memory cells in which the Si dots have been deposited by CVD on SiO2 and then covered by a CVD control oxide. In this paper, we report a study on the potential of these cells for dual bit storage. © 2004 Elsevier B.V. All rights reserved.

AB - We have realized Si nanocrystal memory cells in which the Si dots have been deposited by CVD on SiO2 and then covered by a CVD control oxide. In this paper, we report a study on the potential of these cells for dual bit storage. © 2004 Elsevier B.V. All rights reserved.

UR - http://hdl.handle.net/10447/179562

M3 - Article

VL - 72

SP - 411

EP - 414

JO - Microelectronic Engineering

JF - Microelectronic Engineering

SN - 0167-9317

ER -

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