Laser Beam Lithography For 3-D Surface Patterning

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Abstract

A low power laser processing unit, for microlithographic applications on non-planar surfaces, is described. By combining proper laser beam handling, micropositioning, software control and surface coating techniques, a 5-axis robotic system for laser writing has been set up. Light from a He-Cd laser source is fiber-delivered to a writing head, which moves around a resist coated solid object. After exposure, traditional wet processing can be applied. The unit is capable of patterning metal films deposited on samples up to a size of 50x50x100 mm, with 5 micrometer spatial resolution. An application in 3-D circuit fabrication is presented.
Lingua originaleEnglish
Titolo della pubblicazione ospiteLaser Applications for Mechanical Industry
Pagine315-320
Numero di pagine6
Stato di pubblicazionePublished - 1993

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