How far will Silicon nanocrystals push the scaling limits of NVMs technologies?

Isodiana Crupi, Corso, Gely, Mariolle, Toffoli, Mazen, Melanotte, Ammendola, Baldi, Bez, Semeria, Deleonibus, Ielmini, Giuseppe Nicotra, Rimini, Gerardi, Pananakakis, Puglisi, Baron, Spinelli & 10 others Wan, Van Der Jeugd, Lacaita, De Salvo, Gérard Ghibaudo, Lombardo, Mur, Perniola, Valentina Ancarani, Monzio Compagnoni

Risultato della ricerca: Paper

129 Citazioni (Scopus)

Abstract

For the first time, memory devices with optimized high density (2E12#/cm2) LPCVD Si nanocrystals have been reproducibly achieved and studied on extensive statistical basis (from single cell up to 1Mb test-array) under different programming conditions. An original experimental and theoretical analysis of the threshold voltage shift distribution shows that Si nanocrystals have serious potential to push the scaling of NOR and NAND Flash at least to the 35nm and 65nm nodes, respectively.
Lingua originaleEnglish
Stato di pubblicazionePublished - 2003

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Silicon
Nanocrystals
nanocrystals
scaling
silicon
programming
Threshold voltage
threshold voltage
flash
Data storage equipment
shift
cells

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Materials Chemistry
  • Electrical and Electronic Engineering
  • Condensed Matter Physics

Cita questo

Crupi, I., Corso, Gely, Mariolle, Toffoli, Mazen, ... Monzio Compagnoni (2003). How far will Silicon nanocrystals push the scaling limits of NVMs technologies?.

How far will Silicon nanocrystals push the scaling limits of NVMs technologies? / Crupi, Isodiana; Corso; Gely; Mariolle; Toffoli; Mazen; Melanotte; Ammendola; Baldi; Bez; Semeria; Deleonibus; Ielmini; Nicotra, Giuseppe; Rimini; Gerardi; Pananakakis; Puglisi; Baron; Spinelli; Wan; Van Der Jeugd; Lacaita; De Salvo; Ghibaudo, Gérard; Lombardo; Mur; Perniola; Ancarani, Valentina; Monzio Compagnoni.

2003.

Risultato della ricerca: Paper

Crupi, I, Corso, Gely, Mariolle, Toffoli, Mazen, Melanotte, Ammendola, Baldi, Bez, Semeria, Deleonibus, Ielmini, Nicotra, G, Rimini, Gerardi, Pananakakis, Puglisi, Baron, Spinelli, Wan, Van Der Jeugd, Lacaita, De Salvo, Ghibaudo, G, Lombardo, Mur, Perniola, Ancarani, V & Monzio Compagnoni 2003, 'How far will Silicon nanocrystals push the scaling limits of NVMs technologies?'.
Crupi, Isodiana ; Corso ; Gely ; Mariolle ; Toffoli ; Mazen ; Melanotte ; Ammendola ; Baldi ; Bez ; Semeria ; Deleonibus ; Ielmini ; Nicotra, Giuseppe ; Rimini ; Gerardi ; Pananakakis ; Puglisi ; Baron ; Spinelli ; Wan ; Van Der Jeugd ; Lacaita ; De Salvo ; Ghibaudo, Gérard ; Lombardo ; Mur ; Perniola ; Ancarani, Valentina ; Monzio Compagnoni. / How far will Silicon nanocrystals push the scaling limits of NVMs technologies?.
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AU - Corso, null

AU - Gely, null

AU - Mariolle, null

AU - Toffoli, null

AU - Mazen, null

AU - Melanotte, null

AU - Ammendola, null

AU - Baldi, null

AU - Bez, null

AU - Semeria, null

AU - Deleonibus, null

AU - Ielmini, null

AU - Nicotra, Giuseppe

AU - Rimini, null

AU - Gerardi, null

AU - Pananakakis, null

AU - Puglisi, null

AU - Baron, null

AU - Spinelli, null

AU - Wan, null

AU - Van Der Jeugd, null

AU - Lacaita, null

AU - De Salvo, null

AU - Ghibaudo, Gérard

AU - Lombardo, null

AU - Mur, null

AU - Perniola, null

AU - Ancarani, Valentina

AU - Monzio Compagnoni, null

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