Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries

Risultato della ricerca: Articlepeer review

1 Citazioni (Scopus)

Abstract

A recent programme of technical collaboration between Alelco, DIE of Palermo and CRES of Monreale has led to the development and operative confirmation of a technique for delineating conductive microgeometries on various types of Substrates. This technique, using a flexible System of laser microlithography on planar (2-D) or three-dimensional (3-D) surfaces, has led to the development of several types of thin film components for use at both low and high frequencies. © 1994, MCB UP Limited
Lingua originaleEnglish
pagine (da-a)18-21
Numero di pagine4
RivistaMicroelectronics International
Volume11
Stato di pubblicazionePublished - 1994

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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