Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries

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1 Citazioni (Scopus)

Abstract

A recent programme of technical collaboration between Alelco, DIE of Palermo and CRES of Monreale has led to the development and operative confirmation of a technique for delineating conductive microgeometries on various types of Substrates. This technique, using a flexible System of laser microlithography on planar (2-D) or three-dimensional (3-D) surfaces, has led to the development of several types of thin film components for use at both low and high frequencies. © 1994, MCB UP Limited
Lingua originaleEnglish
pagine (da-a)18-21
Numero di pagine4
RivistaMicroelectronics International
Volume11
Stato di pubblicazionePublished - 1994

All Science Journal Classification (ASJC) codes

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  • ???subjectarea.asjc.3100.3107???
  • ???subjectarea.asjc.3100.3104???
  • ???subjectarea.asjc.2500.2508???
  • ???subjectarea.asjc.2200.2208???

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