Electrical, chemical and morphological characterization of tantalum nitride thin film resistors deposited at low temperature by reactive sputtering for plastic electronic applications

Bruno Giuseppe Pignataro; Salvatore Di Marco

Electrical, chemical and morphological characterization of tantalum nitride thin film resistors deposited at low temperature by reactive sputtering for plastic electronic applications

Bruno Giuseppe Pignataro, Salvatore Di Marco

Fisica e Chimica - Emilio Segrè

Risultato della ricerca: Article › peer review

Lingua originale	English
pagine (da-a)	1-5
Rivista	Surface and Interface Analysis
Volume	2007
Stato di pubblicazione	Published - 2007

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@article{d2800997cd3e49ffa1cd139dafe3916f,

title = "Electrical, chemical and morphological characterization of tantalum nitride thin film resistors deposited at low temperature by reactive sputtering for plastic electronic applications",

author = "Pignataro, {Bruno Giuseppe} and {Di Marco}, Salvatore",

year = "2007",

language = "English",

volume = "2007",

pages = "1--5",

journal = "Surface and Interface Analysis",

issn = "0142-2421",

publisher = "John Wiley and Sons Ltd",

}

TY - JOUR

T1 - Electrical, chemical and morphological characterization of tantalum nitride thin film resistors deposited at low temperature by reactive sputtering for plastic electronic applications

AU - Pignataro, Bruno Giuseppe

AU - Di Marco, Salvatore

PY - 2007

Y1 - 2007

UR - http://hdl.handle.net/10447/25086

M3 - Article

VL - 2007

SP - 1

EP - 5

JO - Surface and Interface Analysis

JF - Surface and Interface Analysis

SN - 0142-2421

ER -