Abstract
The plume of a laser-ablated indium-tin-oxide target was investigated by optical emission spectroscopy. Atomic and ionic species of indium, tin and oxygen were observed; moreover, molecular bands of indium oxide were identified in the fluorescent spectra. The effects of the oxygen as a background gas and of the laser fluence on the behaviour of the ejected particles were studied with respect to the intensity of the emission and the delay time as a function of the observation distance from the target surface. The non-linear behaviour of the fluorescent species with the process conditions could infer spatial variations of the plume composition. The analysis demonstrates a plume expansion process where the ejected species interact with the molecules of the background gas by reactive collisions.
Lingua originale | English |
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pagine (da-a) | 341-354 |
Numero di pagine | 14 |
Rivista | Optics Communications |
Volume | 197 |
Stato di pubblicazione | Published - 2001 |
All Science Journal Classification (ASJC) codes
- ???subjectarea.asjc.1600.1606???
- ???subjectarea.asjc.2200.2208???
- ???subjectarea.asjc.2500.2504???
- ???subjectarea.asjc.3100.3107???