The plume of a laser-ablated indium-tin-oxide target was investigated by optical emission spectroscopy. Atomic and ionic species of indium, tin and oxygen were observed; moreover, molecular bands of indium oxide were identified in the fluorescent spectra. The effects of the oxygen as a background gas and of the laser fluence on the behaviour of the ejected particles were studied with respect to the intensity of the emission and the delay time as a function of the observation distance from the target surface. The non-linear behaviour of the fluorescent species with the process conditions could infer spatial variations of the plume composition. The analysis demonstrates a plume expansion process where the ejected species interact with the molecules of the background gas by reactive collisions.
|Numero di pagine||14|
|Stato di pubblicazione||Published - 2001|
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