Artificial dielectric optical structures: A challenge for nanofabrication

Giuseppe Costantino Giaconia, Torrini, Giaconia, Murad, Wilkinson

Risultato della ricerca: Articlepeer review

8 Citazioni (Scopus)

Abstract

Diffractive optical components can be made using multiple level kinoforms or single level artificial dielectric structures. The latter require the fabrication of pillars of equal depth but differing width and spacing. As a demonstration device, the diffractive optic equivalent of a wedge has been made in GaAs for use at 1.15 μm. The need for all pillars to have the same height was met by using a selective etch and a very thin etch-stop layer on AlGaAs. The experimental diffraction efficiency was 87.8%, among the best ever obtained and close to the theoretical maximum of 97.6%. © 1998 American Vacuum Society.
Lingua originaleEnglish
pagine (da-a)3903-3905
Numero di pagine3
RivistaJOURNAL OF VACUUM SCIENCE & TECHNOLOGY. B
Volume16
Stato di pubblicazionePublished - 1998

All Science Journal Classification (ASJC) codes

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  • ???subjectarea.asjc.2200.2208???

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