Abstract
We have investigated a fully planar technology for the development of arraysof X-ray microcalorimeters with doped germanium thermal sensor. We describethe proposed approach and show promising results obtained with the deep etching ofgermanium, the most critical step of the whole process.
Lingua originale | English |
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pagine (da-a) | 387-393 |
Numero di pagine | 7 |
Rivista | Journal of Low Temperature Physics |
Volume | 151 |
Stato di pubblicazione | Published - 2008 |
All Science Journal Classification (ASJC) codes
- ???subjectarea.asjc.3100.3107???
- ???subjectarea.asjc.2500.2500???
- ???subjectarea.asjc.3100.3104???