A fully planar approach to the construction of X-Ray microcalorimeters with doped Germanium sensors

Claudio Arnone; Marco Barbera; Giuseppe Lullo; null Silver; null Perinati; null Collura; Jeffery Beeman

A fully planar approach to the construction of X-Ray microcalorimeters with doped Germanium sensors

Claudio Arnone, Marco Barbera, Giuseppe Lullo, Silver, Perinati, Collura, Jeffery Beeman

Risultato della ricerca: Article › peer review

Abstract

We have investigated a fully planar technology for the development of arraysof X-ray microcalorimeters with doped germanium thermal sensor. We describethe proposed approach and show promising results obtained with the deep etching ofgermanium, the most critical step of the whole process.

Lingua originale	English
pagine (da-a)	387-393
Numero di pagine	7
Rivista	Journal of Low Temperature Physics
Volume	151
Stato di pubblicazione	Published - 2008

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics
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Condensed Matter Physics

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title = "A fully planar approach to the construction of X-Ray microcalorimeters with doped Germanium sensors",

abstract = "We have investigated a fully planar technology for the development of arraysof X-ray microcalorimeters with doped germanium thermal sensor. We describethe proposed approach and show promising results obtained with the deep etching ofgermanium, the most critical step of the whole process.",

keywords = "X-ray, detectors, microcalorimeter, planar technology, X-ray, detectors, microcalorimeter, planar technology",

author = "Claudio Arnone and Marco Barbera and Giuseppe Lullo and Silver and Perinati and Collura and Jeffery Beeman",

year = "2008",

language = "English",

volume = "151",

pages = "387--393",

journal = "Journal of Low Temperature Physics",

issn = "0022-2291",

publisher = "Springer New York",

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TY - JOUR

T1 - A fully planar approach to the construction of X-Ray microcalorimeters with doped Germanium sensors

AU - Arnone, Claudio

AU - Barbera, Marco

AU - Lullo, Giuseppe

AU - Silver, null

AU - Perinati, null

AU - Collura, null

AU - Beeman, Jeffery

PY - 2008

Y1 - 2008

N2 - We have investigated a fully planar technology for the development of arraysof X-ray microcalorimeters with doped germanium thermal sensor. We describethe proposed approach and show promising results obtained with the deep etching ofgermanium, the most critical step of the whole process.

AB - We have investigated a fully planar technology for the development of arraysof X-ray microcalorimeters with doped germanium thermal sensor. We describethe proposed approach and show promising results obtained with the deep etching ofgermanium, the most critical step of the whole process.

KW - X-ray

KW - detectors

KW - microcalorimeter

KW - planar technology

KW - X-ray

KW - detectors

KW - microcalorimeter

KW - planar technology

UR - http://hdl.handle.net/10447/46466

M3 - Article

VL - 151

SP - 387

EP - 393

JO - Journal of Low Temperature Physics

JF - Journal of Low Temperature Physics

SN - 0022-2291

ER -