A fully planar approach to the construction of X-Ray microcalorimeters with doped Germanium sensors

Claudio Arnone, Marco Barbera, Giuseppe Lullo, Silver, Perinati, Collura, Jeffery Beeman

Risultato della ricerca: Articlepeer review

1 Citazioni (Scopus)

Abstract

We have investigated a fully planar technology for the development of arraysof X-ray microcalorimeters with doped germanium thermal sensor. We describethe proposed approach and show promising results obtained with the deep etching ofgermanium, the most critical step of the whole process.
Lingua originaleEnglish
pagine (da-a)387-393
Numero di pagine7
RivistaJournal of Low Temperature Physics
Volume151
Stato di pubblicazionePublished - 2008

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • ???subjectarea.asjc.2500.2500???
  • Condensed Matter Physics

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