Technologies for the fabrication of cylindrical fine line devices

Research output: Contribution to journalArticlepeer-review

4 Citations (Scopus)

Abstract

A microlithographic process suited for metal patterning on cylindrical dielectric substrates has been developed. This includes all steps from metal coating to final etching, with resolution in the 5 μm range.
Original languageEnglish
Pages (from-to)417-420
Number of pages4
JournalMicroelectronic Engineering
Volume35
Publication statusPublished - 1997

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

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