Silicon nitride-based deep sub-λ slit for ultra-broadband THz coherent detection

Alessandro Tomasino, Alessandro Busacca, Matteo Clerici, Riccardo Piccoli, Sebastien Delprat, Alessandro Tomasino, Yoann Jestin, Yoann Jestin, Marco Peccianti, Roberto Morandotti, Mohamed Chaker, Luca Razzari

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We report on the characterization of a new type of CMOS-compatible device for terahertz solid-state biased coherent detection, which relies on a 1-µm-wide metallic slit embedded in a thin film of PECVD-grown silicon nitride.
Original languageEnglish
Title of host publicationCLEO 2018 - Proceedings
Number of pages2
Publication statusPublished - 2018

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Atomic and Molecular Physics, and Optics

Fingerprint

Dive into the research topics of 'Silicon nitride-based deep sub-λ slit for ultra-broadband THz coherent detection'. Together they form a unique fingerprint.

Cite this