Seed-Layer-Free Atomic Layer Deposition of Highly Uniform Al2O3 Thin Films onto Monolayer Epitaxial Graphene on Silicon Carbide

Simonpietro Agnello, Angelo Armano, Filippo Giannazzo, Ioannis Deretzis, Emanuela Schilirò, Angelo Armano, Bela Pecz, Rositsa Yakimova, Raffaella Lo Nigro, Fabrizio Roccaforte, Antonino La Magna, Bela Pecz, Ivan G. Ivanov, Simonpietro Agnello

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Engineering & Materials Science