On the use of grazing incidence small angle X-ray scattering (GISAXS) in the morphological study of ion-implanted materials

Antonino Martorana, Elti Cattaruzza, Claudia Mondelli, Chiara Maurizio, Francesco Gonella, Giovanni Mattei, Francesco D'Acapito, Alessandro Longo

Research output: Contribution to journalArticlepeer-review

6 Citations (Scopus)

Abstract

Grazing-incidence small-angle X-ray scattering has become a widely used technique for the morphological analysis of surface systems. Here it is show how this technique can be applied to a buried system, like metallic clusters in glass obtained by ion implantation. The optimization of the data-collection geometry is described as well as the details of the quantitative data analysis. An experimental example on Cu + Au-implanted glasses shows the potentiality of the technique.
Original languageEnglish
Pages (from-to)272-277
Number of pages6
JournalJournal of Synchrotron Radiation
Volume11
Publication statusPublished - 2004

All Science Journal Classification (ASJC) codes

  • Radiation
  • Nuclear and High Energy Physics
  • Instrumentation

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