Laser Beam Lithography For 3-D Surface Patterning

Giuseppe Costantino Giaconia; Claudio Arnone; Calogero Pace

Laser Beam Lithography For 3-D Surface Patterning

Giuseppe Costantino Giaconia, Claudio Arnone, Calogero Pace

Ingegneria

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Abstract

A low power laser processing unit, for microlithographic applications on non-planar surfaces, is described. By combining proper laser beam handling, micropositioning, software control and surface coating techniques, a 5-axis robotic system for laser writing has been set up. Light from a He-Cd laser source is fiber-delivered to a writing head, which moves around a resist coated solid object. After exposure, traditional wet processing can be applied. The unit is capable of patterning metal films deposited on samples up to a size of 50x50x100 mm, with 5 micrometer spatial resolution. An application in 3-D circuit fabrication is presented.

Original language	English
Title of host publication	Laser Applications for Mechanical Industry
Pages	315-320
Number of pages	6
Publication status	Published - 1993

Fingerprint Dive into the research topics of 'Laser Beam Lithography For 3-D Surface Patterning'. Together they form a unique fingerprint.

Cite this

@inbook{eb2380fdebde4e9192d396e443e930ba,

title = "Laser Beam Lithography For 3-D Surface Patterning",

abstract = "A low power laser processing unit, for microlithographic applications on non-planar surfaces, is described. By combining proper laser beam handling, micropositioning, software control and surface coating techniques, a 5-axis robotic system for laser writing has been set up. Light from a He-Cd laser source is fiber-delivered to a writing head, which moves around a resist coated solid object. After exposure, traditional wet processing can be applied. The unit is capable of patterning metal films deposited on samples up to a size of 50x50x100 mm, with 5 micrometer spatial resolution. An application in 3-D circuit fabrication is presented.",

author = "Giaconia, {Giuseppe Costantino} and Claudio Arnone and Calogero Pace",

year = "1993",

language = "English",

isbn = "978-94-010-4879-8; 978-94-011-1990-0",

pages = "315--320",

booktitle = "Laser Applications for Mechanical Industry",

}

TY - CHAP

T1 - Laser Beam Lithography For 3-D Surface Patterning

AU - Giaconia, Giuseppe Costantino

AU - Arnone, Claudio

AU - Pace, Calogero

PY - 1993

Y1 - 1993

N2 - A low power laser processing unit, for microlithographic applications on non-planar surfaces, is described. By combining proper laser beam handling, micropositioning, software control and surface coating techniques, a 5-axis robotic system for laser writing has been set up. Light from a He-Cd laser source is fiber-delivered to a writing head, which moves around a resist coated solid object. After exposure, traditional wet processing can be applied. The unit is capable of patterning metal films deposited on samples up to a size of 50x50x100 mm, with 5 micrometer spatial resolution. An application in 3-D circuit fabrication is presented.

AB - A low power laser processing unit, for microlithographic applications on non-planar surfaces, is described. By combining proper laser beam handling, micropositioning, software control and surface coating techniques, a 5-axis robotic system for laser writing has been set up. Light from a He-Cd laser source is fiber-delivered to a writing head, which moves around a resist coated solid object. After exposure, traditional wet processing can be applied. The unit is capable of patterning metal films deposited on samples up to a size of 50x50x100 mm, with 5 micrometer spatial resolution. An application in 3-D circuit fabrication is presented.

UR - http://hdl.handle.net/10447/425923

M3 - Chapter

SN - 978-94-010-4879-8; 978-94-011-1990-0

SP - 315

EP - 320

BT - Laser Applications for Mechanical Industry

ER -

Laser Beam Lithography For 3-D Surface Patterning

Abstract

Other files and links

Cite this