Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries

Giuseppe Costantino Giaconia; Claudio Arnone; null Greco; Calogero Pace

Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries

Giuseppe Costantino Giaconia, Claudio Arnone, Greco, Calogero Pace

Ingegneria

Research output: Contribution to journal › Article › peer-review

1 Citation (Scopus)

Abstract

A recent programme of technical collaboration between Alelco, DIE of Palermo and CRES of Monreale has led to the development and operative confirmation of a technique for delineating conductive microgeometries on various types of Substrates. This technique, using a flexible System of laser microlithography on planar (2-D) or three-dimensional (3-D) surfaces, has led to the development of several types of thin film components for use at both low and high frequencies. © 1994, MCB UP Limited

Original language	English
Pages (from-to)	18-21
Number of pages	4
Journal	Microelectronics International
Volume	11
Publication status	Published - 1994

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Atomic and Molecular Physics, and Optics
Condensed Matter Physics
Surfaces, Coatings and Films
Electrical and Electronic Engineering

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title = "Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries",

abstract = "A recent programme of technical collaboration between Alelco, DIE of Palermo and CRES of Monreale has led to the development and operative confirmation of a technique for delineating conductive microgeometries on various types of Substrates. This technique, using a flexible System of laser microlithography on planar (2-D) or three-dimensional (3-D) surfaces, has led to the development of several types of thin film components for use at both low and high frequencies. {\textcopyright} 1994, MCB UP Limited",

author = "Giaconia, {Giuseppe Costantino} and Claudio Arnone and Greco and Calogero Pace",

year = "1994",

language = "English",

volume = "11",

pages = "18--21",

journal = "Microelectronics International",

issn = "1356-5362",

publisher = "Emerald Group Publishing Ltd.",

}

TY - JOUR

T1 - Flexible Laser Tracing Systems for Defining Thin Film Hybrid Geometries

AU - Giaconia, Giuseppe Costantino

AU - Arnone, Claudio

AU - Greco, null

AU - Pace, Calogero

PY - 1994

Y1 - 1994

N2 - A recent programme of technical collaboration between Alelco, DIE of Palermo and CRES of Monreale has led to the development and operative confirmation of a technique for delineating conductive microgeometries on various types of Substrates. This technique, using a flexible System of laser microlithography on planar (2-D) or three-dimensional (3-D) surfaces, has led to the development of several types of thin film components for use at both low and high frequencies. © 1994, MCB UP Limited

AB - A recent programme of technical collaboration between Alelco, DIE of Palermo and CRES of Monreale has led to the development and operative confirmation of a technique for delineating conductive microgeometries on various types of Substrates. This technique, using a flexible System of laser microlithography on planar (2-D) or three-dimensional (3-D) surfaces, has led to the development of several types of thin film components for use at both low and high frequencies. © 1994, MCB UP Limited

UR - http://hdl.handle.net/10447/425917

M3 - Article

VL - 11

SP - 18

EP - 21

JO - Microelectronics International

JF - Microelectronics International

SN - 1356-5362

ER -