Fabrication and Characterization of Polymeric Optical Waveguides Using Standard Silicon Processing Technology

Claudio Arnone, D'Arrigo, D'Arrigo, Sciuto, Libertino

Research output: Contribution to conferenceOtherpeer-review

4 Citations (Scopus)

Abstract

We report the fabrication and characterization of a rib polymeric waveguide having a thick layer of oxidized porous silicon as an innovative solution for the lower cladding. The waveguide was fabricated using standard silicon substrates and Si-based technology. The multimodal guiding structure has a polymethylmetacrylate (PMMA) core and the innovative lower cladding was obtained by thermal oxidation of a porous silicon layer. The waveguide does not have the upper cladding. Propagation loss measurements were performed at 1.48 μm using the cut-back method. We obtained propagation loss of about 1.7 dB/cm, confirming the possibility to use the porous silicon oxide as the lower cladding layer, for low cost waveguide applications.
Original languageEnglish
Pages265-270
Number of pages6
Publication statusPublished - 2005

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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