Electrical, chemical and morphological characterization of tantalum nitride thin film resistors deposited at low temperature by reactive sputtering for plastic electronic applications

Bruno Giuseppe Pignataro, Salvatore Di Marco

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
Pages (from-to)1-5
JournalSurface and Interface Analysis
Volume2007
Publication statusPublished - 2007

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