Copper patterning on dielectrics by laser writing in liquid solution

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20 Citations (Scopus)

Abstract

A technique suitable for laser induced deposition of copper on LiNbO 3 and glass is presented. Deposition is achieved from Cu salt solution mixed with glycerol, after coating the surface with a very thin metal film. High resolution and low electrical resistivity can be achieved, using laser power levels in the 20-mW range. The technique can be used for electrode and interconnect fabrication in integrated optical devices, as well as mask repair or microelectronics applications.
Original languageEnglish
Pages (from-to)3404-3406
Number of pages3
JournalApplied Physics Letters
Volume64
Publication statusPublished - 1994

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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