Copper patterning on dielectrics by laser writing in liquid solution

Giuseppe Costantino Giaconia; Claudio Arnone

Copper patterning on dielectrics by laser writing in liquid solution

Giuseppe Costantino Giaconia, Claudio Arnone

Ingegneria

Research output: Contribution to journal › Article › peer-review

20 Citations (Scopus)

Abstract

A technique suitable for laser induced deposition of copper on LiNbO 3 and glass is presented. Deposition is achieved from Cu salt solution mixed with glycerol, after coating the surface with a very thin metal film. High resolution and low electrical resistivity can be achieved, using laser power levels in the 20-mW range. The technique can be used for electrode and interconnect fabrication in integrated optical devices, as well as mask repair or microelectronics applications.

Original language	English
Pages (from-to)	3404-3406
Number of pages	3
Journal	Applied Physics Letters
Volume	64
Publication status	Published - 1994

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

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@article{24397cc058fb4465be0b35abdf0f421a,

title = "Copper patterning on dielectrics by laser writing in liquid solution",

abstract = "A technique suitable for laser induced deposition of copper on LiNbO 3 and glass is presented. Deposition is achieved from Cu salt solution mixed with glycerol, after coating the surface with a very thin metal film. High resolution and low electrical resistivity can be achieved, using laser power levels in the 20-mW range. The technique can be used for electrode and interconnect fabrication in integrated optical devices, as well as mask repair or microelectronics applications.",

author = "Giaconia, {Giuseppe Costantino} and Claudio Arnone",

year = "1994",

language = "English",

volume = "64",

pages = "3404--3406",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

}

TY - JOUR

T1 - Copper patterning on dielectrics by laser writing in liquid solution

AU - Giaconia, Giuseppe Costantino

AU - Arnone, Claudio

PY - 1994

Y1 - 1994

N2 - A technique suitable for laser induced deposition of copper on LiNbO 3 and glass is presented. Deposition is achieved from Cu salt solution mixed with glycerol, after coating the surface with a very thin metal film. High resolution and low electrical resistivity can be achieved, using laser power levels in the 20-mW range. The technique can be used for electrode and interconnect fabrication in integrated optical devices, as well as mask repair or microelectronics applications.

AB - A technique suitable for laser induced deposition of copper on LiNbO 3 and glass is presented. Deposition is achieved from Cu salt solution mixed with glycerol, after coating the surface with a very thin metal film. High resolution and low electrical resistivity can be achieved, using laser power levels in the 20-mW range. The technique can be used for electrode and interconnect fabrication in integrated optical devices, as well as mask repair or microelectronics applications.

UR - http://hdl.handle.net/10447/425915

M3 - Article

VL - 64

SP - 3404

EP - 3406

JO - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

ER -